Gerhard Kalkowski : rechercher sur Z-Library

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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Investigations into an electrostatic chuck design for 450mm Si wafer

Kalkowski, Gerhard, Peschel, Thomas, Hassall, Geoffrey, Alves, Helder, Risse, Stefan, Starikov, Alexander

Année:

2012

Langue:

english

Fichier:

PDF, 3.92 MB

english, 2012

2

Electrostatic clamping with an EUVL mask chuck: Particle issues

Gerhard Kalkowski, Jacob R. Zeuske, Stefan Risse, Sandra Müller, Thomas Peschel, Mathias Rohde

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.70 MB

english, 2011

3

Electrostatic chuck for EUV masks

Gerhard Kalkowski, Stefan Risse, Sandra Müller, Gerd Harnisch

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 295 KB

english, 2006

4

Direct bonding for the encapsulation of transverse optical gratings

Kalkowski, Gerhard, Benkenstein, Tino, Rothhardt, Carolin, Fuchs, Frank, Zeitner, Uwe

Journal:

Microelectronic Engineering

Année:

2013

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2013

5

Flatness characterization of EUV mask chucks

Gerhard Kalkowski, Stefan Risse, Sandra Müller

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 784 KB

english, 2007

6

Determination of local electrostatic forces for EUVL mask chucks

Gerhard Kalkowski, Thomas Peschel, Stefan Risse, Sandra Müller, Roxann L. Engelstad, Jacob R. Zeuske, Pradeep Vukkadala

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 1.11 MB

english, 2010

7

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Direct Bonding of Glass Substrates

Kalkowski, Gerhard, Rohde, Mathias, Risse, Stefan, Eberhardt, Ramona, Tünnermann, Andreas

Année:

2010

Langue:

english

Fichier:

PDF, 550 KB

english, 2010

8

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems II - Low temperature GRISM direct bonding

Krödel, Matthias, Robichaud, Joseph L., Goodman, William A., Kalkowski, Gerhard, Harnisch, Gerd, Grabowski, Kevin, Benkenstein, Tino, Ehrhardt, Sascha, Zeitner, Uwe, Risse, Stefan

Année:

2015

Langue:

english

Fichier:

PDF, 768 KB

english, 2015

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Electrostatic chucking of EUVL masks: coefficients of friction

La Fontaine, Bruno M., Kalkowski, Gerhard, Semmler, Christian, Risse, Stefan, Peschel, Thomas, Damm, Christoph, Müller, Sandra, Bauer, René

Année:

2010

Langue:

english

Fichier:

PDF, 1.35 MB

english, 2010

10

SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Optical Scanning: Design and Application - Balancing of a polygonal scanner for HDTV applications

Kalkowski, Gerhard, Risse, Stefan, Guyenot, Volker, Beiser, Leo, Sagan, Stephen F., Marshall, Gerald F.

Année:

1999

Langue:

english

Fichier:

PDF, 1.47 MB

english, 1999

11

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 21 January 2012)] Fiber Lasers IX: Technology, Systems, and Applications - New approach to fabrication of a Faraday isolator for high power laser applications

Rothhardt, Carolin, Rekas, Miroslaw, Kalkowski, Gerhard, Eberhardt, Ramona, Tünnermann, Andreas

Année:

2012

Langue:

english

Fichier:

PDF, 3.59 MB

english, 2012

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Alternative Lithographic Technologies IV - Influence of thermal load on 450 mm Si-wafer IPD during lithographic patterning

Peschel, Thomas, Kalkowski, Gerhard, Eberhardt, Ramona, Tong, William M.

Année:

2012

Langue:

english

Fichier:

PDF, 1.70 MB

english, 2012

13

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 2 February 2013)] Fiber Lasers X: Technology, Systems, and Applications - Fabrication of a high power Faraday isolator by direct bonding

Rothhardt, Carolin, Rekas, Miroslaw, Kalkowski, Gerhard, Haarlammert, Nicoletta, Eberhardt, Ramona, Tünnermann, Andreas, Hendow, Sami T.

Année:

2013

Langue:

english

Fichier:

PDF, 1.03 MB

english, 2013